Oct. 2019 - Mar. 2022
➢ Handle Lithography exposure equipment.
➢ Solve trouble with high tech.
➢ Preventive Maintenance
➢ Equipment parts control
➢ Teams work with cross-function engineers and vendors.
Sep. 2017 - Jun. 2019
Sep. 2013 – Jun. 2017
Immersion exposure machine's wafer table surface edge gradually becomes contaminated because wafer backside wear and the immersion hood residual water, it will lead to overlayer defect on the product, so we develop a simple external tool to inspect and clean the machine
1.Reduce machine cleaning time and increase machine up rate
2.Improve detection methods to reduce response time
3.Quantify cleaning machine parameters and reduce human error