Sr. Field Service Engineer  •  Nikon Precision Taiwan Ltd.

October 2013 - Present

Primarily responsible for customer service with DUV lithography machine issues.

Diagnosing and trouble shooting with any kinds of scanner issues.

Modify machine and tune parameters to meet customer's request.

Master in high order lens aberration adjustment.

Implement first Nikon I14 stepper top/bottom lens replacement in Taiwan.

Projection lens optical adjustment according to exposure data analysis.

Write technical documentation to build SOP.

Coordinate with clients directly for project execution and machine issue solving.

Cultivate the independent work ability of junior engineers.

Global support experience:

Projection lens refurbish project at Kumagaya Nikon factory, Japan – July, 2015

Machine recovery support at Renesas Electronics Corporation after the Kumamoto earthquake– May, 2015

Top/Bottom lens replacement project at GlobalFoundries, Singapore– June, 2016

Nikon S207 scanner wafer stage linear motor replacement skill transfer at Hejian Technology, China– May, 2021