Jan 2008 - Present
Process improvement and optimize
- AZ IPS-6090 bump shape stabilize:Modify different softbake, exposure dose/gap and PEB to improve the production bump height, diameter stability and yield control.
- Exposure accuracy improvement : Training photo process engineer to setup auto-alignment recipe for SUSS aligner. Setup auto-alignment recipe to prevent the exposure shift issue by operator manual alignment.
- Modify and simplify process recipe to improve throughput.
New material and structure evaluation
- New resistance evaluation and process parameter setup for AZ IPS-6090.
- Photo process DOE for related process window and issue solving.
New Tool and Material Qualify
- SUSS coater and aligner, ULVAC and PSK descum, Evatec and SPTS sputter, UT and ORC stepper qualify, procedure setup and production.
- New mask supplier qualify