Process improvement and optimize - AZ IPS-6090 bump shape stabilize：Modify different softbake, exposure dose/gap and PEB to improve the production bump height, diameter stability and yield control. - Exposure accuracy improvement : Training photo process engineer to setup auto-alignment recipe for SUSS aligner. Setup auto-alignment recipe to prevent the exposure shift issue by operator manual alignment. - Modify and simplify process recipe to improve throughput. New material and structure evaluation - New resistance evaluation and process parameter setup for AZ IPS-6090. - Photo process DOE for related process window and issue solving. New Tool and Material Qualify - SUSS coater and aligner, ULVAC and PSK descum, Evatec and SPTS sputter, UT and ORC stepper qualify, procedure setup and production. - New mask supplier qualify