經歷: 1.F15B 7/10nm Etching EE→ 1 year 2.F18A 5/4nm Etching EE → 3 year 工作成果: 1.Etching Parts managerment/Burn in method/Clean wac/Wet clean flow→followed by F18B/F21 2.Optimize Y-Coating parts clean workflow/COA上機Critira/Finding out new key COA→followed by F18B/F21 3.BEOL defect/particle improved by 60% (5ea to 2ea) 4.BEOL tool available time improved from 50% to 80%. 5.BEOL tool MTBC improved from 60hrs to 715hrs 6.New staff training 7.Leader of PM team. 8.Cost Sponsor→Monthly Cost improved from 50 to 20 million(NT) 9.PMS Sponsor→PM Successful Rate 20% to 80% 10.The 3rd year promoted to 32(senior engineer) 專長: 1.Defect EDX analysis 2.Excel skills 3.T/S skills (Datalog/Algorithm analysis) 4.On duty skills 5.FDC/SPC/IKCM....

1.Dynamic and static stress and vibration analysis of machine tools 2.Design experiments and verify the results of the simulation analysis