李冠霆

我是Kurt,目前於TSMC擔任製程工程師

擁有 handle NTO(new tape out) and defect improvement 經驗,並擅長跨部門合作,目前主力放於 handle 驗機。
研究所於中央研究院物理所量子材料實驗室進行研究,擅長進行跨領域合作,藉由中研院製程與量測的技術搭配合作領域實驗室的專長,共同完成研究計畫,合作對象有雷射實驗室與薄膜材料實驗室。


TSMC:
• NTO (new tape out) handle

• Defect improvement
• 驗機
研究所:

• Device fabrication 
• Membrane material manufacturing ( NbSe2 mechanical oscillator) 


台灣桃園

+886-961-191-223
[email protected]

Profile 04 00@2x

學歷

國立臺灣師範大學,物理研究所,2017 年 9 月 - 2019 年 11 月

國立東華大學,物理學系,2012 年 9 月 - 2017 年 6 月

工作經歷

經歷一,2020 年 3 月 - 2021年 5 月

於 TSMC 擔任 蝕刻製程工程師,主要負責defect improvement, NTO handle and 驗機,並擅長跨部門合作。
• NTO (建程式, lot handle, TEM)
• Defect improvement (Optimization metrology recipe wait IT and ME)
• 驗機 (建程式、lot handle、機台HW T/S with EE)

經歷二,2019 年 9 月 - 2019年12月

與中央大學實驗室合作製作單層石墨烯機械振盪器,由中研院物理所負責設計並製作晶片,中央實驗室負責濕式材料轉印技術。

經歷三,2019 年 2 月 - 2019 年 8 月

於電極與二硒化鈮機械震盪器的交互作用的實驗中,負責設計與製作晶片並將其與薄膜材料結合,包含曝光、顯影、舉離、蒸鍍參數的測試與乾式轉印薄膜的製備,並參與量測。

經歷四,2018 年 10 月 - 2019 年 2 月

在新的低溫系統中整合了複雜直流線路,其中包含腔體內部之晶片乘載腔體與其控制之電路板、腔體外部之切換控制組件。晶片連結到外部儀器的訊號輸入整合成一台控制儀器,同時也解決了複雜線路插拔損耗與操作上的不便,加速實驗的運轉與便利。

經歷五,2017 年 9 月 - 2018 年 10 月

負責晶片的設計、樣品台之設計與製作、鑽石切割刀座之設計與製作,破片測試與打線。

工作技能

NTO (new tape out)

1. 建程式 (New, corner and skew recipe)

2. Lot handle ( SHR, Corner and experiment Run-card )
3. TEM (make ETCH profile mean MTS)

Defect improve

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研究所技能

Device fabrication

1. Sample clean 

2. Spin coat polymer 

3. Electron beam writing

4. Development

5. Thermal deposition

6. Lift off

Membrane material manufacturing

1. Exfoliation sheets

2. Viscoelastic mechanical exfoliation

3. Flake transfer

Instrument operation 

1. SEM (E-Beam exposure)

2. Thermal evaporation

3. Electron beam evaporation

4. Photoresist spinner

5. Reactive-ion etching (RIE)

Software operation

1. Excel

2. AutoCAD

3. Solidworks

自我介紹

        我是李冠霆,家中有父母與兩個妹妹,桃園人高中就讀治平高中,大學就讀國立東華大學物理學系,並於大學專題期間學會Arduino微控制器,除了大學專題外,為了能再實驗上有更多學習的機會,畢業之後於國立師範大學就讀物理學碩士,並於中央研究院物理所量子材料實驗室進行研究,研究的題目為"電極與二硒化鈮機械震盪器的交互作用" 。 

        擅長進行跨領域合作,藉由中研院製程與量測的技術搭配合作領域實驗室的專長,共同完成研究計畫,合作對象有雷射實驗室與薄膜材料實驗室,也因此在實驗中具備了獨立完成電子束微影製程與薄膜材料製備的能力。在這裡非常感謝師大江佩勳老師與中研院物理所陳啟東老師的指導與栽培。 

        在這樣的學習環境中可以接觸到多種的機台與不同的工作,各種晶片製程參數測試與材料製備都可以自己動手操作並執行,不只是貴重機台的操作,也包含鑽孔、切割、焊線…等。這樣一步一步動手操作,各種細節都自己解決,並思考下一步的實驗該如何執行,在這樣的過程中學習到邏輯思考能力、明白如何獲得蒐集資料、並實際動手操作實驗,讓實驗在正常的軌道上運行,且更能熟悉機械運作的每一個細節。 

        在中央研究院這兩年很有挑戰,身邊的同儕都很出眾,這樣的壓力讓我感到充實,因為會促使我成長,我學到了解決問題,也學到了團隊合作,並感受到了當問題解決並做出實際成果後的喜悅,這樣的成就感與歷練會促使我勇於接受挑戰,並且盡我所能的去解決問題。未來我也希望可以用我能力與專長幫助貴公司,我相信我的人格特質與受過的研究邏輯訓練,能夠在不久的將來為貴公司之產能做出有效的貢獻。

Guan-Ting Li (李冠霆)

I am Kurt

During my research period, I conducted research in the Quantum Materials Laboratory of the Institute of Physics, Academia Sinica, and was good at interdisciplinary cooperation. The cooperation targets were the Laser Lab and Materials Lab.


Mainly responsible for:

• Device fabrication
• Membrane material manufacturing ( NbSe2 mechanical oscillator) 


Mobile: +886-961-191-223
[email protected]

Yangmei Dist., Taoyuan City 326, Taiwan

Profile 04 00@2x

EDUCATION

Master of Physics

National Taiwan Normal University, Taipei, Taiwan Sep. 2017 - Jan. 2019

Bachelor of Physics

National Dong Hwa University, Hualien, Taiwan Sep. 2012 - Jun. 2017

EXPERIENCE

Sep. 2019 - Dec. 2019

Cooperated with the National Central University ( NCU ) Lab to produce single-layer graphene mechanical oscillators. Our Lab was responsible for designing and manufacturing the chips, and the NCU was responsible for wet material transfer technology.

Feb. 2019 - Aug. 2019

In the experiment of the Electric control mechanical oscillator of NbSe2, I was responsible for designing and fabricating the chips and combining it with the membrane material, including testing of exposure, development, lift off, evaporation parameters, and the preparation of dry transfer stamps.

Oct. 2018 - Feb. 2019

establishing the DC control system for low-temperature, this not only solves the inconvenience of wire insertion loss and operation, but also speeds up the operation and convenience of the experiment.

Sep. 2017 - Oct. 2018

Responsible for the design of the chips, the design and production of the sample holder, the design and production of the diamond cutting knife seat, the fragment test and wire bonding.

SKILLS


• Hands-on experience on plenty of fabrication methods, including, thermal evaporator, SEM E-Beam writing, RIE, etc 


• Structural analysis and physical measurements, including SEM, DC measurement system, etc

PERSONAL STATEMENT

        I’m Guan-Ting Li. I’m studying at the Department of Physics at National Donghua University. I also learned about the Arduino microcontroller During my college project. After graduating, I went to National Normal University to study for a master’s degree in physics. I also had the opportunity to enter the Academia Sinica to follow the experiment and study with professor Chii-Dong Chen. My thesis topic is Electric control mechanical oscillator of NbSe_2. In the experiment, I have the ability to independently complete the electron beam lithography process and membrane material manufacturing.

        During my master’s degree, In the first year, I was mainly responsible for wafer designing, material transfer fabrication. In the second year, I was mainly responsible for E-Beam lithography, optical setup, and DC setup. The design software I have worked with is as follows: AutoCAD, Solidworks, the process equipment is as follows: SEM (E-Beam exposure), thermal evaporation system, electron beam evaporation system, photoresist spinner…etc.

        The greatest thing I contributed so far in the lab was establishing the DC control system for low-temperature, this not only solves the inconvenience of wire insertion loss and operation, but also speeds up the operation and convenience of the experiment. In the experiment, I tried to test and make a chip of a mechanical oscillator to carry a membrane, these include SEM exposure parameters, development and lift off parameters, photoresist thickness testing of the carrier membrane, and process improvement for dry transfer stamps. 

        In addition to completing my research project, I also coordinated with other lab members on tasks. This opportunity made me excited, I also learned to work in teams. My experience allowed me to deal with many issues in my lab work, and made me mature both mentally and emotionally. I can assure you that I can deal with multifaceted problems and I can make a positive contribution in your company.