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吳駿睿
基於卷積神經網路之光學蝕刻模擬和遮罩優化
基於卷積神經網路之光學蝕刻模擬和遮罩優化
基於卷積神經網路之光學蝕刻模擬和遮罩優化
By
吳駿睿
・
Taipei City, Taiwan
Connect
與聯華電子之產學合作計畫,利用類神經卷積網路(CNNs)實現光學蝕刻模擬(電路設計圖至光刻及化學侵蝕結果),其中透過非監督式的學習方式,生成電路的形變量,再透過其建出最後的蝕刻模擬結果,得到電路瑕疵評估的重要資訊,而非單純的圖對圖轉換。
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Post
吳駿睿
Connect
Published: Jul 15th 2019
64
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Deep Learning
CNN
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