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System maintenance service provider Used equipment refurbishment and sale Product and parts research and development in collaboration with customers New equipment service support development to meet customer needs Chuck overhaul and repair Chamber heater overhaul and repair PCB overhaul and repair DC/RF Generator overhaul and repair Second-source parts trading Machine installation services Machine modification and relocation Consignment buying and selling of second-hand equipment 服務項目包括提供用於半導體