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Semiconductor Engineer / Electrochemical Energy Storage material Research / X-Ray analysis  

<Passion / Positive / Communication >
Semiconductor Wet clean Process tech 5nm → 3nm High-K metal gate 
Electrochemical Energy Storage_The material research of Supercapacitor
Electrochemical analysis (CV , CP & EIS )
X-ray analysis (XRD , XAS , & XPS) 

National Tsing Hua University

Engineer

車祐成

Powerchip Semiconductor Manufacturing Corporation

Integration Technology Engineer

300mm Technology Foundry (Transfer and Production Integration )

■ New Tape out
■ Process and WAT Window tunning
■ Process experiment CIP executing
■ In-line / Defect / WAT / Yield troubleshooting

Achievement:
(1) Platform improvements were executed through tape out, and pi run were excuted to design experimental splits to meet customer requirements. 

(2) WAT matching by understanding device characteristics and collaborating with Diffusion module through Design of Experiment (DOE) and the development of online recipe changes.

(3) Yield improved~1% through the design of BEOL WET/Thin Film Continuous Improvement Processes (CIP) for defect model improvements in the cleanliness of process equipment.

MEOL HK Metal Gate Wet Clean Process Engineer from N5 to N3 technology

■Wet clean/etch tool maintenance and Productivity management.
■Inline/Offline SPC management and troubleshooting.
■Co-work with equipment engineer, process integration engineer to solve issues.

Achievement:
(1) N5 metal gate defect solution by studying the defect physical / chemical properties and designing continuous improvement process (CIP) . 

(2) Design of Experiment (DOE) for offline wafer Q-time effect issue.

(3) New tech N3 tool wet etching rate improvement.

tsmc

Process Engineer

Research:
Electrochemical energy storage material research combined with synchrotron radiation_ X-Ray Diffraction ,X-Ray Absorption Spectroscopy and X-Ray Photospectroscopy analysis.

Publication:
M.-J. Deng*, K.-W . Chen, Y.-C. Che,I.-J. W ang, C.-M. Lin,J.-M. Chen, K.-T. Lu, Y .-F. Liao, and H. Ishii, ACS Appl. Mater. Interfaces 2017, 9, 479−486

The experience of oversea research:
To analyz the material of supercapacitor by using 8 GeV energy synchrotron radiation at Spring-8 in Japan .

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