Process PEE Engineer
1. Working with wet, DF division to clarify Root Cause of the tool gap on line, that causes 53 ACI THK mean low and leads 49 O/S. Assist company to get IDL gain (die loss) 0.3% under this finding.
2. Winning the 2022 Best Newcomer Award based on 53 ACI Inline gap under 53 Nitride cover conversion study. Moreover, award paper qualification of Micron Taiwan Technical Seminar competition on the basis of this study.
3. Implement Python to automate the organization, retrieval of data(param/device), and create graphs from Excel.
4. Conduct cost project ( warm up quality reduction, CMP tool part lifetime extend, second source evaluation, slurry reduction) to save 0.3M/ year for USD.
5. Co-working with vendors to solve the measurement tool disruption crisis from photo 03 skip conversion, and draft a SOP.
6. Responsible for 53 GATE NITRIDE BUFF CMP(FEOL), Back up for 53 OXIDE BUFF CMP.
Process ADTT Engineer
1. Co-working with IT and R2R team to modify R2R function to optimize CMP inline performance on EBARA tools.
2. Responsible for 49 HARDMASK BUFF CMP(Cell), and 29 RAD NITRIDE CMP.