1.Maintenance according to schedule every week a.Inspect process module have some different abnormal or not b.Test the module efficacy have any shift 2.Machine have problem need to trouble shooting a.Follow the alarm message and try to use the electrical manual to find the problem is b.If my any action can't fix the problem then i will find my coworker to team discussion c.If any action can't make better i will try to call machine vendor what can I do and try to fix the problem on the discussion d.If machine vendor need into the fab for trouble shooting I will record and write the SOP The SUSS Alinger Exposure MA300 cooling system has poor performance. 1.IR-scan detection. The electric control some module temperature have out spec problem 2.After evaluating, I found the cooling system had poor performance. 3.Conact the contract service. Help me add the fan system on the control box door to put the temperature in control. Detection TEL Coater process recipe has waste step a.Cooperation with process engineers b.Increase production capacity TEL Coater