• Tool's vendor : AMAT(Endura PVD), ASM(Pulsar XP ALD), KE(Single wafer baking).
• Created SOP for operation and alarm handles for equipment.
• Tool period maintenance & trouble shooting.
• Managed the project and offline KPI (parts, count of alarm, chart performance) .
• On-duty alone & work in shift to handle the tool status.
• FDC alarm recovery & SPC data analysis.
• Co-work with vendors to install or re-locate the tool.