12” Fab Automation Solutions ARGO 2.2M (height 2205, width 3010, depth 610 mm), applied to 2 / 3 LP type EQ, to provide maximum to 5 buffers. Special design for low ceiling fab. Patented X-Y table plus robust structure design http://www.chiff.com.tw/T-CHINESE/12-ntb2.2.html